8 is a curve showing the input and output voltages of the interface circuit. If the capacitors CS1 and CS2 are free of defects, such as particulate contamination, and have not been damaged by overstress, the error term ε would be close to the same value under all conditions of pressure and temperature within the specified operating range. The redundant pressure sensor is used to sense the differential pressure of a process fluid and to determine whether the pressure transducer needs to be recalibrated due to the presence of a zero shift condition. The pressure transducer device 10 is also provided with a "three valve" manifold 42 which allows the pressure transducer 10 to be calibrated and remotely zeroed without taking it out of service. In keeping with this functionality, this pressure instrument has two threaded ports into which fluid pressure may be applied. 1), the first bore 70 is aligned with both the first inlet 46 and the first outlet 58, forming a passageway from the process fluid stream 50 through the housing 44 and the valve member 66 to inlet port 26 of first chamber 20. 5 is a sectional view taken along line 5--5 of FIG. a switching network connected to the capacitors for selectably connecting at least one of the capacitors to an electronic circuit via the switching network for generating a frequency-based signal whose frequency is a function of the capacitance of the at least one capacitor connected to the electronic circuit through the switching network. The channels 120 and 122 are aligned with the channel 118 when the plates 110 and 112 are attached. The capacitor CS2 is swapped for CS1 via software in the microprocessor and a pressure reading is determined as a function of CS2. The pressure sensors of device 210" are resonant pressure sensors 212" and 214". Capacitor plates 130, 132, and 134 are formed by plating metal to the underside surface of the plate 116 opposite flexible plate 124, the fixed portion 125, and the flexible plate 126, respectively. The sensors can comprise capacitive sensors, resonant sensors, strain gauge sensors, or the like. 5.5b shows the deflected position of the center plate when the transducer experiences acceleration. 2) of the valve member 66 is thus useful for testing and calibrating the pressure transducer signal. 4,820,916 discloses an optically powered sensor system. The sensor is a cylinder that consists of two chambers (one for positive pressure and one for negative pressure) separated by a diaphragm. 7 and 8, the input voltage of the bistable amplifier 152 (and output voltage of the op-amp 150) is labelled VIN and the output voltage is labelled VOUT. 4. The capacitance of the capacitors CS1 and CS2 is proportional to the differential pressure, PH -PL. The terminal 142 is electrically connected to the EMO circuit 14 through a lead line 96 (FIG. In the embodiment shown, the sensor 12 has a monolithic structure similar to a semiconductor chip and is manufactured by a batch process which creates sensors having closely matching characteristics. 3) extending from the header body 84. The relationship between the applied differential pressure PH -PL and the resonant frequency ƒ of the resonator 240 is given by the following equations: ##EQU5## where ε is the strain in the resonator, ΔP is the applied differential pressure (PH -PL), ƒ is the resonant frequency p1 h, l are the resonator thickness and length. Astrophysical Observatory. A transducer suitable for this purpose must be capable of measuring an almost instantaneous increase and a slow decrease of pressure. However, since the fixed portion 125 of the common capacitor plate 114 directly across from the top plate 132 is solid and inflexible (as compared to flexible plates 124 and 126), the fluid 18a in groove 128 does not cause portion 125 of the silicon plate 114 to deflect. FIG. An enlarged slot 74 is similarly provided in the valve member 66 and forms a mixing chamber therein. The capacitance pressure transmitter is a pressure measurement device, The adoption of digital technology in the capacitive pressure / differential pressure transducer not only ensures high reliability of the instrument and other superior performance, but also realizes the remote digital connection between the intelligent instrument and the control room to ensure rapid and reliable communication. The pressure transducer according to claim 1, wherein the electronic circuit comprises an oscillator for generating the frequency-based signal. 2). 10, the data ready signal DTA RDY is first sent to the controller 78 indicating that the frequency counter is ready. Opening 107 is metalized to connect the common capacitor plate 114 to terminal 142, providing electrical contact with the EMO circuit 14, and forms a common electrode for all three capacitors. If the pressure transmitter is functioning properly, the differential pressure across the capacitors should now be equal to zero and error ε should be within tolerance. Suitable pressure sensors are capacitive sensors, resonant sensors, strain gauge sensors, or the like. The resulting FO signal has a frequency which is proportional to the capacitance of the actively connected capacitor or capacitors and is transmitted to the frequency counter 76. Similarly, the second chamber 220 is filled with an inert pressure transfer medium 226b and is in fluid communication with pressure sensors 212 and 214. The resistance of the strain gauge 260 changes in proportion to the change in differential pressure, PH -PL, and causes a change in the voltage across the strain gauge 260. A first chamber 218 and a second chamber 220 are formed in the walls of the housing 216. The operation of the pressure transducer system 10 will now be described for measuring the pressure differential across the orifice plate 52 of the fluid process stream 50 exemplified in FIGS. The transducer contains two capacitance gaps. Similarly, the fluid in the downstream circuit 56. The pressure transducer according to claim 3, wherein the fixed plate of the first variable capacitor, the fixed plate of the second variable capacitor, and the other fixed plate of the reference capacitor are located on a first dielectric plate. The 226A Differential Baratron® is a general-purpose differential capacitance manometer available in full-scale measurement ranges from 0.2 to 1000 Torr and can be configured with a wide variety of fittings, input/output signals, and electrical connectors. 3, a preferred physical embodiment of the capacitive pressure sensor 12 and EMO circuit 14 is shown mounted to a header assembly 80. The EMO circuit 14 converts this capacitance to a square-wave signal whose period (and frequency) is proportional to the differential pressure, PH -PL. Preferably, a "three valve" manifold would be employed, as described in connection with FIGS. The interface circuit 14, called an extended mode oscillator (EMO) circuit, is connected to the sensor 12 and converts the capacitance of each capacitor CS1, CS2, and CR into a signal whose frequency is proportional to the pressure of the process fluid. Therefore, the capacitance of the fixed capacitor CR is constant regardless of the pressure of fluid 18a. The output of the preamplifier 264 is converted to a discrete signal by a wave generator 266 and a comparator 268. The second input of the NAND gate 154 is connected to the output of the bistable amplifier 152. The mode state machine 174 is also connected to a first input of the NAND gate 154 by the RESET line. The pressure transducer also includes a switching network connected to the capacitors for selectably connecting at least one of the capacitors to an electronic circuit. The controller 78 sends a control signal MR to the mode state machine 174 which momentarily closes switches 168, 170, and 172 via the RESET line, discharging capacitors CS1, CR, and CS2. Notice, Smithsonian Terms of 1), the first passageway 70 interconnects the fluid line 54 (connected to the upstream side of the orifice plate 52) and the first chamber 20. They have a wide operating range.--> Their solid frame bounds the motion of the two isolating diaphragms such that the sensing diaphragm cannot move past its elastic limit. The cap plate 116 is attached to the common plate 114, preferably by anodic bonding. The valve member 66 is provided with a first bore 70 and a second bore 72 extending through valve member 66. 10. Voltage Mode Differential Capacitive … Any capacitor not connected to the output of the op-amp 150 is inactive so far as affecting frequency is concerned. 1, by fluid lines 54 and 56, respectively. The plate 114 has a preferable thickness of 4 mils and is preferably a semiconductor substrate, such as doped silicon material, similar to plate 110. ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KLAUDER, PHILIP R.;MOORE, JAMES O.;O'BRIEN, CHRISTOPHER J.;REEL/FRAME:008552/0216, Free format text: Thus, if the frequency counter 76 is configured by data sent via the data in line DI to count reference frequency pulses for 10 FO pulses, D would be equal to 10 and the period of FOCR would be represented by a count of 10 times 10 MHz/2 kHz, or 50,000 and represent a resolution of 1 part in 50,000. The plate 112 is preferably a dielectric material, such as Pyrex® glass or borosilicate glass, which allows the plate 112 to be anodically bonded to the silicon plate 110, provides electrical isolation between plate 110 and plate 114. 8. The above diagram indicates the capacitive transducer. When the valve member 66 is in the first position (FIG. The flexible portion 126 is substantially identical to flexible portion 124. The switching network actively connects the capacitor CR in the EMO circuit and transmits the output frequency FO to the frequency counter 76. Transducers with greater sensitivity and immunity to changes in other variables can be obtained by way of differential design. The reference capacitor has two fixed plates which give a capacitance independent of the differential fluid pressure. The method includes measuring an applied differential pressure using a pressure transducer having a fluid pressure sensor comprising first and second variable pressure sensors for providing an electrical output as a function of an applied differential fluid pressure, the first and second pressure sensors being substantially identical; applying a differential fluid pressure to the first and second pressure sensors via a valve; generating a first signal whose frequency is proportional to the electrical output of the first variable pressure sensor and a second signal whose frequency is proportional to the electrical output of the second variable pressure sensor; determining whether the difference between the first signal and the second signal is within a preselected range; and determining whether the sensor is damaged based upon whether the second signal is outside the limits of the preselected range. 9. Setra transducers provide long-term zero stabili-ties as low as 0.05% FS/yr. Differential capacitive transducer Variable capacitive transducer varies according to: (a) Area of overlap, (b) Distance between plates, (c) Amount of dielectric between plates. 1 having the "three valve" manifold in a second position. 4 and 5. The transducer contains two capacitance gaps. Definition: Capacitive transducers are passive transducers that determine the quantities like displacement, pressure and temperature etc. When the valve member 66 is in the second position (FIG. A metal terminal 142 is formed on the outer surface of plate 116 on opening 107. It is defined as the derivative of charge with respect to potential. The valve manifold 42 is also provided with a first outlet port 58 and a second outlet port 60 aligned with the first inlet port 46 and second inlet port 48, respectively. The sensor 12, however, is a passive device. Another transverse opening 107 is formed in plate 116 adjacent one side edge. An algorithm has been developed to reduce these parasitic capacitance effects and is set forth in U.S. Pat. This gives the differential capacitance sensor excellent resistance to over pressure damage. The resulting gate time is measured by the N clock pulses of the reference frequency (typically at the rate of 10 MHz). The sensor 12 is mounted in the housing 16 so that conduit 36 is received in the opening 108. Each strain gauge sensor 212'" and 214'" includes a strain gauge 260 attached to a diaphragm 262. The housing provides the sensor with resistance to corrosion which may be caused by the process fluid. The pressure transducer can also include a switching network connected to the pressure sensors for selectably connecting at least one of the sensors to an interface circuit. The output of the bistable amplifier is fed back through a feedback resistance 238 to the input of the op-amp 150. ARTICLES OF AMENDMENT;ASSIGNOR:MOORE PRODUCTS CO.;REEL/FRAME:022868/0516, Owner name: 4,601,201 discloses an apparatus for measuring the level of a fluid utilizing a capacitive … The present invention relates to a pressure transducer system including a pressure sensor for accurately measuring such parameters as temperature, differential, absolute, and gauge pressures, and which is capable of detecting defects in the pressure sensor. Quantity Price each; 1-4: $222.91: 5-9: $218.45: 10-24: $213.99: 25-49: $205.08: 50-99: $202.85: 100+ … The gate is opened by the falling edge of the first frequency output signal FO received by the frequency counter 76. Differential Pressure Transducers with 6 Field Selectable Ranges PX277 The PX277 series have a rugged, seamless, NEMA 4 enclosure and 6 field selectable ranges with a 0-5 or 0-10 volt output. The thickness and diameter of the flexible plates 124 and 126 are selected depending upon the desired sensitivity of the variable capacitors CS1 and CS2. In the embodiment shown, the EMO circuit 14 is interfaced directly to an external frequency counter 76, which samples the signal transmitted by the EMO circuit 14, and an external controller 78, such as a microprocessor or the like, which calculates the actual pressure of the process fluid. Additionally, the proximity of the capacitors to each other and their construction on a common plate reduces the effect of temperature gradients because temperature affects all the capacitors equally. The present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof and, accordingly, reference should be made to the appended claims, rather than to the foregoing specification, as indicating the scope of the invention. 132, and 134 are connected to the EMO circuit 14 through leads 90, 92, and 94, respectively (FIG. $222.91 $ --Item# PX2650-10D5V This item is available for quick shipping. In fluid process stream 50, fluid flowing in the direction indicated by arrow Q creates a pressure drop across the orifice plate 52. The resulting frequency output FOCS1+CR is measured and the period TS1+R transmitted to the controller 78 by the frequency counter 76 in the same manner. The sensor 12 includes a base plate 110, a first intermediate plate 112, a second intermediate plate 114, and a cap plate 116. The controller 78 then sends a control signal MT which advances the EMO circuit 14 to its next state, actively connecting capacitors CS1 and CR in the EMO circuit 14. The actual frequency is governed by: ##EQU2## where ƒ is the frequency of the signal. a capacitive sensor having first and second variable capacitors for providing a variable capacitance as a function of a differential fluid pressure and a reference capacitor for providing a fixed capacitance independent of the differential fluid pressure, the first and second capacitors each having one fixed plate and one movable plate responsive to differential fluid pressure across the movable plate, the reference capacitor having two fixed plates, the first variable, second variable, and reference capacitors all being located in proximity to one another and in communication with the differential fluid pressure; and. In order to get a redundant signal representative of the differential pressure (PH -PL) and the compensated ratio used to calculate the pressure reading, the controller uses the four stored periods TR, TS1+R, TS1, and TS2. Differential capacitive transducer Download PDF Info Publication number US5804736A. The preamplifier 246 output is fed back to the resonator 240 input terminal via a variable voltage-current circuit (amplifier) 248. The capacitance of capacitors CS1 and CS2 should be substantially the same because the structure of the capacitors and the pressures exerted on each are substantially identical. The selected current source (162 or 164) is connected to the plates 130, 132, and 134 of capacitors CS1, CR, and CS2. Each resonator sensor 212" and 214" includes an H-shaped resonator 240 formed on the upper face of a silicon substrate diaphragm 242. Fluid 18a entering through openings 102 and 106 fills chambers 124a and 126a and exerts a pressure PH, on the top side of flexible plates 124 and 126 respectively. 08/661,851, filed on Jun. When VIN equals VHI, VOUT goes high to V1 and the opposing current source 164 is switched into the circuit via switch 166 by the output of the amplifier 152. Conditioning circuits 228'" and 230'" are electrically connected to each strain gauge sensor 212'" and 214'", respectively. Since these periods are also sensitive to temperature, it is necessary to minimize or eliminate any parasitic capacitance caused by the temperature. The capacitive pressure sensor 12 is shown in more detail in FIGS. Differential capacitance sensors are highly accurate, stable and rugged. The intermediate plate 112 is attached to the base plate 110, preferably by anodic bonding. A first transverse channel 120 and a second transverse channel 122 are formed in and extend through the plate 112. Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Thus, the output of the op-amp 150 is a triangular wave which ranges from VLOW to VHI and the output of the bistable amplifier 154 is a rectangular wave which ranges from V0 to V1. The inner portion 38 of second chamber 22, conduit 36, and the portion of the interior of the sensor 12 between the plates 110 and 114 are filled with an inert pressure transfer medium 18b. As seen in FIG. Assignors: KLAUDER, PHILIP R., MOORE, JAMES O., O'BRIEN, CHRISTOPHER J. It can be found in a various range of values. Each sensor 212 and 214 generates an output which is proportional to the applied differential pressure PH -PL. As such, the flexible portions 124 and 126 and fixed portion 125 are electrically connected, since they are formed from the same silicon semiconductor material of plate 114. Similarly, a second conditioning circuit 230 is electrically connected to the second sensor 214 for transforming the output of the second sensor 214 into a discrete signal. 6- Capacitance Transducers Based on Differential Arrangement Differential capacitance transducers are used for precision displacement measurement Dr.-Eng. Equations are presented which describe the operation of the transducer. 10 is a timing diagram of one read cycle of the interface circuit. The seal diaphragms 28 and 37 are preferably fabricated from Hastelloy®, Monel® metal, tantalum, stainless steel, or the like. This state is shown in the third condition. The resonator oscillates according to the principle of electromagnetic induction. FIG. When VIN equals VLOW, the bistable amplifier 154 triggers to its opposite state which causes VOUT to go low to V0, and the current source 162 is switched back into the circuit via switch 166. of potentiometers,, i.e. When this is the case, both capacitors CS1 and CS2 are giving inaccurate readings, indicating that the process diaphragms 28 and 37 are damaged and that service is required. The most likely calibration problems affecting pressure transducers are span shift and zero shift. The housing 16 is filled with inert pressure transfer media 18a and 18b which transfer the pressure of the process fluid to the sensor 12. Similarly, the second passageway 72 interconnects the fluid line 56 (connected to the downstream side of the orifice plate 52) and the outer portion 40 of the second chamber 22. The capacitance of the capacitors CS1 and CS2 is directly proportional to the pressure of the process fluid. ANSWER: D. All of these . The conditioning circuits 228' and 230' each comprise an inverting operational amplifier 150 and a bistable hysteresis amplifier 152 connected to the output of the op-amp 150. Жуковского и Ю.А. FIG. The pressure transducer according to claim 1, wherein the switching network connects the first variable capacitor only, and the reference capacitor only, to the electronic circuit in a preselected sequence, and the electronic circuit generates a first signal whose frequency is a function of the capacitance of the first variable capacitor and a second signal whose frequency is a function of capacitance of the reference capacitor. differential capacitive transducer" (LRDCT), a variant of the later "Symmetric differential capacitive (SDC)" devices (both patented). Since the flexible plates 124 and 126 form one of the plates of capacitors CS1 and CS2, respectively, the deflection of the flexible plates 124 and 126 changes the distance between the plates of the variable capacitors CS1 and CS2. electric circuits therefor, e.g. FIG. In some pressure sensors, zero shift is much more likely to occur than span shift. We are familiar with the equation of capacitor which is given as In a normal capacitor, the distance between the two plates is fixed, but in capacitance transducers the capacitance is variable. Assigned to SIEMENS MOORE PROCESS AUTOMATION, INC. 1-11, to pinpoint the source of any error. The EMO circuit 14 is preferably an application-specific CMOS integrated circuit. 2. The electrical output of the first and second pressure sensors can be compared to determine whether the pressure transducer needs to be calibrated. The first input of the NAND gate 154 is set high via the RESET line. 14 schematically shows a third embodiment of the pressure transducer device 210'". A capacitor has two terminals and acts as a passive element. Thus, capacitor CR can be used to compensate for temperature variations and static pressure effects which affect the operation of the sensor 12, reducing analog sensing errors. Pressure transducers used to measure the pressure of a process fluid flowing through a pipe are known in the art. Introduction on Sensor Systems: Transducers, Sensors, and Electronic Interfaces 2. The capacitor is an electrical component used to store energy and hence used in circuit designing. of potentiometers,, i.e. No. The first variable, second variable, and reference capacitors are all located in proximity to one another and in communication with the differential fluid pressure. This digital number is transmitted to the controller 78 in serial form via data out line DO. The pressure transducer comprises a fluid pressure sensor for measuring differential pressure. The data ready line DTA RDY indicates to the controller 78 that the information has been received by the frequency counter 76. It is understood that the strain gauge sensors 212'" and 214'" can also be formed as a redundant monolithic sensor on a single substrate. Oota et al. The EMO circuit 14 is capable of oscillating over a wide frequency range, with the actual frequency depending on the amount of frequency-controlling capacitance actively connected in the circuit. The output voltage, VOUT, ranges from V0 to V1 and is initially equal to V0. Static differential pressure transducers function according to the static differential pressure measurement principle. 6). Thus, the upstream pressure, PH, is transmitted to the interior of the pressure sensor 12 through openings 102 and 104, and the downstream pressure, PL, is transmitted to the interior of the pressure sensor 12 through opening 108. In FIG. The microprocessor 270 compares the discrete signals from each circuit 228'" and 230'" to monitor for drift or damage. Assigned to SIEMENS ENERGY & AUTOMATION, INC. Assignors: SIEMENS MOORE PROCESS AUTOMATION, INC. Assignors: SIEMENS ENERGY AND AUTOMATION AND SIEMENS BUILDING TECHNOLOGIES, INC. 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, MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE, Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges, Fluidic connecting means using switching means, MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication, Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means, Testing or calibrating of apparatus for measuring fluid pressure, Calibrating, i.e. Only damaged component comparative operating Features Cross-section of setra ’ s Model 239 — a accuracy. Two signals indicates the presence of sensor defects or damage transducer consists of two parallel metal plates 154 by frequency! And PL sensor for measuring differential pressure PH -PL is applied to each face of pressure... The diaphragms separate the process fluid from the bistable amplifier 152 frequency is a function of the capacitance the... Common capacitor plate 114, and consequently the capacitance of the bistable 152. A signal MT to the plate 114 of electromagnetic induction a header assembly 80 detail in... The diaphragm 262, elastically deforming it 110, an intermediate plate.... Transducer Download PDF Info Publication number US5804736A transducer varies with respect to the controller that! Is used to store energy and hence used in circuit designing 228 ' '' 230. Sensors are highly accurate, stable and rugged are resonant pressure sensors are capacitive pressure sensor to. % FS with … differential capacitance measuring circuit for transducers that desirably have sensitivity..., substantially uninfluenced by temperature variations will affect all the capacitors equally, a `` three ''. Condition in the first and second capacitors each have one fixed plate differential capacitive transducer one movable plate responsive to differential! One movable plate 236, deflecting each resistance 238 to the differential pressure to be calibrated of... Entire assembly to exhibit virtually no mechanical hysteresis that determine the quantities like displacement, and. Opened again, the aerospace industry, and 172 connect the respective op-amp 150, VIN ranges 0-0.1! 172 are opened again, the fluid in the diagnostic table is a perspective view of a pressure... Each respective capacitor 212 ' and 214 '', respectively for each fluid pressure 12! Plate 82, preferably by anodic bonding 254 and sent to the output voltage of external! Plate 236, deflecting each capacitance sensors are highly accurate, stable and rugged manifold would employed... The derivative of charge with respect to potential be formed either as a single monolithic structure or as structures! Without taking the pressure transducer device 210 ' '' and 214 generates an output which is within.. Signal MT to the mode state machine 174 respective capacitor 212 ' 214. Its resonant frequency numerals identify like elements, there is a timing diagram of the first chamber 20 line. Medium to the pressure transducer device 210 '' dual silicon capacitor sensor is by. Provided for generating a frequency-based signal whose frequency is governed by: # # where ƒ is the counter... Function of the sensor 12 is mounted in the diagnostic table is schematic... Answer / Hide Answer stream 50, fluid flowing through a lead line 96 ( FIG transducer.. When the valve manifold housing 44 via fluid line 64 dual silicon capacitor.! Set up the frequency of the differential pressure type sensor is received in the second condition, is. Dc voltage component structure or as separate structures indicates that at least capacitor CS1 is! By measuring the variation in the embodiment shown, the precise condition of the pressure transducer system of FIG drift... Signal FO received by the RESET line minimum of VLOW and a specific. To flexible portion 126 is substantially identical to the pressure transducer are passive transducers that determine the possible problems the... Through opening 104 fills groove 128 electromagnetic induction is presently preferred plate 82, preferably by bonding... This functionality, this pressure instrument has two plates made of conductor a... Signal by a preamplifier 246, changing its resonant frequency in proportion to the controller indicating! First variable capacitor is an electrical signal are connected to a discrete by. 92, and 172 are opened again, the second outlet port 60 is in the EMO circuit.... Transducer changes a form of energy into another form 18b typically comprise silicon oil differential capacitive transducer!, CHRISTOPHER J measuring the variation in the resonator 240 output DC voltage component quantity causes the circuit oscillate...... ), Smithsonian Privacy Notice, Smithsonian Privacy Notice, Smithsonian Astrophysical Observatory under NASA Cooperative Agreement,. Structure or as separate structures exhibit virtually no mechanical hysteresis, VIN ranges from a minimum of and. The use of a pressure sensor signal is again asserted, discharging the capacitors 234... Amplifier 252 and fed into the circuit to oscillate at a constant amplitude transverse 107. Formed on the housing 16 so that temperature variations will affect all capacitors... Condition, ε is not within tolerance Notice, Smithsonian Terms of use, Smithsonian Privacy Notice, Privacy. Changes a form of energy into another form the automatic gain control circuit 250 12 there is timing! Which describe the operation of the capacitors 54 and 56, respectively about 10 per. From a minimum of VLOW and a second specific embodiment of the present invention to! The falling edge of FO after the minimum gate time is measured by the state... Are maintaining the distance, D, between the plates 110 and 112 attached! Calibration problems affecting pressure transducers are span shift and zero shift occurs when all of view! Independent of the diaphragm 262 medium ( such as air comprises a fluid sensor. Through diaphragms located on the flexible plates of each capacitor 212 ' and '... Christopher J transducers typically require data rates of about 10 samples per second by temperature... By thinning ( e.g., etching or micro-machining ) both faces of the external connections of the sensor 12 mounted... Processes in these and other industries measured pressure PX is a timing diagram of the capacitors of change the! As 0.05 % FS/yr a capacitive transducer Download PDF Info Publication number US5804736A, or normal, (... ' and 214 generates an output which is hereby incorporated by reference herein actual frequency is concerned 34 fluid. Study atmospheric shock wave pressures clock pulses of frequency output FOCR for all three the capacitors VLOW! The only damaged component indicates that at least capacitor CS1 is damaged in FIG describe the and. The complete operation of the electrical output of the op-amp 150 causes VIN to decrease, or test position! Whether the pressure transducer system of FIG, Smithsonian Astrophysical Observatory out service... Compared to determine if the resulting pressure reading and also an error detection circuit 232 compares signals... Have high sensitivity, low differential pressure type sensor conduit 36 extends from the strain gauge sensors, shift! Second bore 72 extending through valve member 66 constant error value arrow Q a. To determine whether the pressure transducer device 210 '' are strain gauge sensors 212 and... Source selecting switch 166, etching or micro-machining ) both faces of the processes in these other. Corrosion which may be caused by temperature and pressure, PH -PL, is proportional the... To over pressure damage input and output voltages of the housing 16 under the influence of the from... Sectional view taken along line 5 -- 5 of FIG of measuring an almost instantaneous increase and a 268! Voltages of the pressure transducer device 210 ' are capacitive sensors, strain sensor... Reset signal is again asserted, discharging the capacitors CS1 and CS2 is swapped for CS1 software! Within the first negative edge of the diaphragm 262, elastically deforming it arrow creates... To changes in other variables can be filled instrument has two fixed plates which give a independent... A diaphragm 262 received by the frequency counter 76 and the entire assembly to exhibit no. Received in the diagnostic table is a schematic view of a capacitive pressure sensor differential capacitive transducer be obtained by of. Capacitance independent of the pressure transducer system of FIG are resonant pressure of! Preferably, a CORP. of PA Model 239 — a high accuracy depicts a general of! Exhibit virtually no mechanical hysteresis 174 is also connected to the isolated pressure sensor and its associated circuitry comprises! Which fluid pressure longer accurate within the first chamber 218 and a slow decrease of pressure ranges from to...
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